Integrated micro actuator and LVDT for high precision position measurements

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10337890
APP PUB NO 20170089733A1
SERIAL NO

15377458

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A single housing with a non-ferromagnetic piezo-driven flexure has primary and secondary coil forms of different diameters, one coaxially inside the other, integrated in the flexure. The cylinders defining the planes of the primary and secondaries do not spatially overlap. The secondary coil forms may be wound in opposite directions and wired to provide a transformer device. Movement of the primary relative to the secondaries in the direction of the central axis of the coils can be differentially detected with high precision.

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Patent Owner(s)

  • OXFORD INSTRUMENTS AFM INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bocek, Dan Santa Barbara, US 27 205
Cleveland, Jason Ventura, US 43 293
Klonowski, Matthew Santa Barbara, US 6 45
Longmire, Matthew Santa Barbara, US 3 9
Proksch, Roger Carlos Santa Barbara, US 1 0

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