Dynamic sweep-plow microcantilever device and methods of use

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United States of America Patent

PATENT NO 10352963
APP PUB NO 20170176491A1
SERIAL NO

15389052

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Abstract

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Implementations include a dynamic sweep-plow microcantilever (DSPM) device for nano-machining, nano-manufacturing, and nano-imaging using SPMs (e.g., an AFM). The DSPM device includes two elongated cantilevered arms that are spaced apart at their proximal ends and on which a piezoelectric layer is disposed. The distal ends of the arms are coupled together, and a distal tip is coupled to the distal ends and extends below a plane that includes a lower surface of the arms. The DSPM device is mounted on the AFM and applies nano-machining force through vibration that is induced by the piezoelectric layers on the arms. The DSPM device can vibrate such that the tip undergoes one or both of bending and torsional vibrations, which allows the DSPM device to perform both plowing and/or sweeping in nano-scale. The piezoelectric layers can be used for sensing by collecting vibrational feedback at the distal tip using a laser sensor.

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Patent Owner(s)

  • THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ALABAMA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mahmoodi, Nima Tuscaloosa, US 1 0
Omidi, Ehsan Tuscaloosa, US 3 2

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