System and method for calibration of optical signals in semiconductor process systems

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10365212
APP PUB NO 20180136118A1
SERIAL NO

15802286

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

The disclosure provides an optical calibration device for in-chamber calibration of optical signals associated with a processing chamber, a characterization system for plasma processing chambers, methods of characterizing plasma processing chambers, and a chamber characterizer. In one example, the optical calibration device includes: (1) an enclosure, (2) an optical source located within the enclosure and configured to provide a source light having a continuous spectrum, and (3) optical shaping elements located within the enclosure and configured to form the source light into a calibrating light that approximates a plasma emission during an operation within the processing chamber.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
VERITY INSTRUMENTS INC2901 EISENHOWER STREET CARROLLTON TX 75007

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Corless, John D Carrollton, US 6 45
Daignault, Rick Carrollton, US 1 1
Kueny, Andrew Weeks Carrollton, US 15 218
Lynes, Sean Carrollton, US 2 1
Meloni, Mark Anthony Carrollton, US 10 25
Whelan, Mike Carrollton, US 13 149

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Jan 30, 2023
7.5 Year Payment $3600.00 $1800.00 $900.00 Jan 30, 2027
11.5 Year Payment $7400.00 $3700.00 $1850.00 Jan 30, 2031
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00