Metal oxide thin film, method for depositing metal oxide thin film and device comprising metal oxide thin film

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United States of America Patent

PATENT NO 10366803
APP PUB NO 20170316847A1
SERIAL NO

15521907

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Abstract

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A metal oxide thin film formed of β-MoO3 includes at least one doping element of the group Re, Mn, and Ru. Further, there is described a method of producing such a metal oxide thin film via sputtering and a thin film device with a metal oxide thin film of β-MoO3 that includes at least one doping element selected from the group Re, Mn, and Ru.

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  • PLANSEE SE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hitosugi, Taro Sendai, JP 14 97

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