Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists

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United States of America Patent

PATENT NO 10381251
APP PUB NO 20120288348A1
SERIAL NO

13492341

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Abstract

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An overhead hoist transport vehicle comprising: an overhead hoist; a translating stage; and a gripper coupled to the translating stage, the gripper being configured to grip a material unit; wherein the overhead hoist is configured to transport the material unit to one of a load port and a storage location by performing operations comprising: the overhead hoist being configured to vertically move the gripper to the load port and the storage location; and the translating stage being configured to horizontally move the overhead hoist to the load port and the storage location; and wherein the load port is beneath an overhead rail; and wherein at least a portion of the storage location is disposed lateral to the overhead rail.

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Patent Owner(s)

Patent OwnerAddress
MURATA MACHINERY LTD3 MINAMI OCHIAI-CHO KISSHOIN MINAMI-KU KYOTO-SHI KYOTO 601-8326

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Doherty, Brian J Weston, US 17 2433
Mariano, Thomas R Londonderry, US 10 231
Sullivan, Robert P Wilmington, US 28 425

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