Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10381251
APP PUB NO 20120288348A1
SERIAL NO

13492341

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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An overhead hoist transport vehicle comprising: an overhead hoist; a translating stage; and a gripper coupled to the translating stage, the gripper being configured to grip a material unit; wherein the overhead hoist is configured to transport the material unit to one of a load port and a storage location by performing operations comprising: the overhead hoist being configured to vertically move the gripper to the load port and the storage location; and the translating stage being configured to horizontally move the overhead hoist to the load port and the storage location; and wherein the load port is beneath an overhead rail; and wherein at least a portion of the storage location is disposed lateral to the overhead rail.

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Patent Owner(s)

  • MURATA MACHINERY LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Doherty, Brian J Weston, US 17 1921
Mariano, Thomas R Londonderry, US 10 132
Sullivan, Robert P Wilmington, US 28 222

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