Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10381251
APP PUB NO 20120288348A1
SERIAL NO

13492341

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

An overhead hoist transport vehicle comprising: an overhead hoist; a translating stage; and a gripper coupled to the translating stage, the gripper being configured to grip a material unit; wherein the overhead hoist is configured to transport the material unit to one of a load port and a storage location by performing operations comprising: the overhead hoist being configured to vertically move the gripper to the load port and the storage location; and the translating stage being configured to horizontally move the overhead hoist to the load port and the storage location; and wherein the load port is beneath an overhead rail; and wherein at least a portion of the storage location is disposed lateral to the overhead rail.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
MURATA MACHINERY LTD3 MINAMI OCHIAI-CHO KISSHOIN MINAMI-KU KYOTO-SHI KYOTO 601-8326

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Doherty, Brian J Weston, US 17 1993
Mariano, Thomas R Londonderry, US 10 139
Sullivan, Robert P Wilmington, US 28 233

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Feb 13, 2023
7.5 Year Payment $3600.00 $1800.00 $900.00 Feb 13, 2027
11.5 Year Payment $7400.00 $3700.00 $1850.00 Feb 13, 2031
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00