Integrated sensor and homologous calibration structure for resonant devices

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United States of America Patent

PATENT NO 10386204
APP PUB NO 20190003854A1
SERIAL NO

15636599

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Abstract

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An apparatus is provided which comprises: a substrate; a sensor including a sensing element, wherein the sensor is integrated within the substrate; and a calibration structure integrated within the substrate, wherein the calibration structure is to exhibit one or more physical or chemical properties same as the sensor but without the sensing element.

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Patent Owner(s)

Patent OwnerAddress
INTEL CORPORATION2200 MISSION COLLEGE BLVD SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dogiamis, Georgios C Chandler, US 69 28
Eid, Feras Chandler, US 133 196
Oster, Sasha Chandler, US 25 30
Sounart, Thomas L Chandler, US 27 5

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