Method of cleaning a substrate and apparatus for performing the same

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United States of America Patent

PATENT NO 10395951
APP PUB NO 20170330770A1
SERIAL NO

15442481

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Importance

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Abstract

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In a method of cleaning a substrate, a protecting liquid may be sprayed to a surface of the substrate from a first position in a first spray direction. Cleaning droplets may be injected on to the surface of the substrate. The protecting liquid may be sprayed to the surface of the substrate from a second position different from the first position in a second spray direction. For example, the protecting liquid may be always sprayed from the central portion toward the edge portions in the substrate so that the protecting liquid on the substrate may have a uniform thickness.

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Patent Owner(s)

  • SAMSUNG ELECTRONICS CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kim, Dong-Chul Hwaseong-si, KR 30 739
Kim, Kyoung-Seob Hwaseong-si, KR 3 6
Kim, Seok-Hoon Seongnam-si, KR 37 619
Lee, Hyo-San Hwaseong-si, KR 44 502

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