Molybdenum containing targets

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United States of America Patent

PATENT NO 10403483
APP PUB NO 20180076011A1
SERIAL NO

15804365

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Abstract

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The invention is directed at sputter targets including 50 atomic % or more molybdenum, a second metal element of titanium, and a third metal element of chromium or tantalum, and deposited films prepared by the sputter targets. In a preferred aspect of the invention, the sputter target includes a phase that is rich in molybdenum, a phase that is rich in titanium, and a phase that is rich in the third metal element.

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Patent Owner(s)

Patent OwnerAddress
H C STARCK SOLUTIONS EUCLID LLC21801 TUNGSTEN ROAD EUCLID OH 44117-1117

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gaydos, Mark E Nashua, US 20 149
Hogan, Patrick Alan Somerville, US 10 55
Rozak, Gary Alan Akron, US 20 102
Sun, Shuwei Framingham, US 27 228

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