Method for loading a blank composed of fused silica with hydrogen, lens element and projection lens

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United States of America Patent

PATENT NO 10427965
APP PUB NO 20160145137A1
SERIAL NO

15013499

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Abstract

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A method for loading a blank composed of fused silica with hydrogen, including loading the blank at a first temperature (T1) and a first hydrogen partial pressure (p1), and further loading the blank at a second temperature (T2) which is different from the first temperature and at a second hydrogen partial pressure (p2) which is different from the first hydrogen partial pressure. The first and second temperatures (T1, T2) are lower than a limit temperature (TL) at which a thermal formation of silane in the fused silica of the blank commences. Also disclosed are a lens element produced from such a blank and a projection lens that includes at least one such lens element.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMT GMBHOBERKOCHEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Eva, Eric Aalen, DE 23 86

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