Support frame for pellicle

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United States of America Patent

PATENT NO 10437142
APP PUB NO 20180149965A1
SERIAL NO

15572616

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Abstract

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A support frame for a pellicle includes a frame body made of an aluminum alloy. The frame body has: a top surface onto which a pellicle film is bonded; and an underside surface onto which a transparent substrate is bonded. A material of which the frame body is made has a Young's modulus larger than that of which the transparent substrate is made. The structure described above makes it possible to reduce deformation of the transparent substrate.

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Patent Owner(s)

  • NIPPON LIGHT METAL COMPANY LTD

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Iizuka, Akira Shizuoka, JP 57 562
Isobe, Tomohiro Shizuoka, JP 6 9
Kiyomi, Hayato Shizuoka, JP 2 1
Nakano, Koichi Shizuoka, JP 51 340
Oda, Kazuhiro Shizuoka, JP 37 217

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