Liquid particle counting of semiconductor component parts

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United States of America Patent

PATENT NO 10453709
APP PUB NO 20170330771A1
SERIAL NO

15488538

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Abstract

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Embodiments of the present disclosure generally relate to cleaning substrates, and more particularly, to methods and apparatus for endpoint detection of a cleaning process. The apparatus includes an outer cleaning basin, a liner, and a circulation system coupled to the liner. The circulation system includes a filter for removing particles from a fluid. A liquid particle counter is fluidly coupled to fluid in the liner for performing particle counting. Methods for using the apparatus are also described.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Wang, Jiansheng Union City, US 31 346

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