Porous chemical mechanical polishing pads

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10456886
APP PUB NO 20170203406A1
SERIAL NO

15394044

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Implementations disclosed herein generally relate to polishing articles and methods for manufacturing polishing articles used in polishing processes. More specifically, implementations disclosed herein relate to porous polishing pads produced by processes that yield improved polishing pad properties and performance, including tunable performance. Additive manufacturing processes, such as three-dimensional printing processes provides the ability to make porous polishing pads with unique properties and attributes.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bajaj, Rajeev Fremont, US 162 3380
Chockalingam, Ashwin San Jose, US 31 596
Fu, Boyi San Jose, US 39 664
Ganapathiappan, Sivapackia Los Altos, US 234 1902
Orilall, Mahendra C Downingtown, US 32 855
Patibandla, Nag B Pleasanton, US 159 2040
Redeker, Fred C Fremont, US 195 5499
Redfield, Daniel Morgan Hill, US 65 1172
Yamamura, Mayu San Carlos, US 24 525

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Apr 29, 2027
11.5 Year Payment $7400.00 $3700.00 $1850.00 Apr 29, 2031
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00