EMI Shielding structure in InFO package

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10468355
APP PUB NO 20190181096A1
SERIAL NO

15966691

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Abstract

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A method includes forming a metal post over a first dielectric layer, attaching a second dielectric layer over the first dielectric layer, encapsulating a device die, the second dielectric layer, a shielding structure, and the metal post in an encapsulating material, planarizing the encapsulating material to reveal the device die, the shielding structure, and the metal post, and forming an antenna electrically coupling to the device die. The antenna has a portion vertically aligned to a portion of the device die.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Meng-Tse Changzhi Township, TW 100 1568
Wu, Kai-Chiang Hsinchu, TW 189 1064
Yang, Ching-Feng Taipei, TW 52 362
Yu, Chen-Hua Hsinchu, TW 2207 47923

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