Roll-type processing member, pencil-type processing member, and substrate processing apparatus including any one of these

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10471481
APP PUB NO 20160126113A1
SERIAL NO

14920045

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A roll-type cleaning member for scrubbing and cleaning a target cleaning surface of a substrate includes a plurality of nodules formed on a surface thereof. Each nodule includes a slit which extends so as not to be parallel to the rotation direction of the roll-type cleaning member, upstream edges are formed by the slit so as to serve as edges first contacting the target cleaning surface when a cleaning surface of the nodule contacts the target cleaning surface of the substrate by the rotation of the roll-type cleaning member, and the upstream edges are provided at a plurality of positions of the cleaning surface of the nodule in the circumferential direction.

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First Claim

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Patent Owner(s)

  • EBARA CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ishibashi, Tomoatsu Tokyo, JP 62 239

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