Connection structure, magnetic annealing device using same, and connecting method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10473399
APP PUB NO 20160216032A1
SERIAL NO

15001391

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Disclosed is a connection structure that connects a housing to a magnetic annealing furnace that is provided with a fixedly arranged magnet and includes a first drum flange having a cylindrical flange portion. The connection structure includes: a second drum flange that is attached and fixed to the housing and includes a flange portion configured to externally or internally fit the flange portion of the first drum flange thereto; a first sealant that is installed between facing surfaces of the housing and the second drum flange; and a second sealant that is installed between facing surfaces of the first and second drum flanges.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITEDTOKYO 107-6325

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Abe, Tomoaki Iwate, JP 80 1601
Colgan, Ian Dublin, IE 13 300
Domsa, Ioan Dublin, IE 10 298
Eyres, George Dublin, IE 7 293
Hasegawa, Koyu Iwate, JP 9 47
Sato, Junichi Iwate, JP 316 3631

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