Bulk acoustic wave resonator
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United States of America Patent
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-
Nov 12, 2019
Grant Date -
Nov 22, 2018
app pub date -
Nov 17, 2017
filing date -
May 18, 2017
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A bulk acoustic wave resonator includes a substrate, a lower electrode connection member, a lower electrode, a piezoelectric layer, an upper electrode, an upper electrode connection member, and a dielectric layer in which the lower electrode, the piezoelectric layer, and the upper electrode are embedded. The lower electrode, the piezoelectric layer, and the upper electrode constitute a resonant portion. An extension portion extends away from either the lower electrode or the upper electrode to protrude outwardly from the resonant portion. A capacitor portion is constituted by the extension portion, a portion of the upper electrode connection member disposed above the extension portion, and a portion of the dielectric layer disposed between the extension portion and the portion of the upper electrode connection member disposed above the extension portion.
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