Method to produce chemical pattern in micro-fluidic structure

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United States of America Patent

PATENT NO 10486153
APP PUB NO 20170326548A1
SERIAL NO

15603128

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Abstract

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The present disclosure provides flow cells and methods of fabricating flow cells. The method includes combining three portions: a first substrate, a second substrate, and microfluidic channels between the first substrate and the second substrate having walls of a photoresist dry film. Through-holes for inlet and outlet are formed in the first substrate or the second substrate. Patterned capture sites are stamped on the first substrate and the second substrate by a nanoimprint lithography process. In other embodiments, parts of the patterned capture sites are selectively attached to a surface chemistry pattern formed of silicon oxide islands each disposed on an outcrop of a soft bottom layer.

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Patent Owner(s)

Patent OwnerAddress
ILLUMINA INC5200 ILLUMINA WAY SAN DIEGO CA 92122

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hung, Li-Min Longtan Township, TW 12 12
Peng, Jung-Huei Jhubei, TW 88 448
Tsai, Shang-Ying Pingzhen, TW 69 338

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