Fabrication of multilayer nanograting structures
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United States of America Patent
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Nov 26, 2019
Grant Date -
Feb 14, 2019
app pub date -
Oct 12, 2018
filing date -
Feb 17, 2016
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Provided are nanograting structures and methods of fabrication thereof that allow for stable, robust gratings and nanostructure embedded gratings that enhance electromagnetic field, fluorescence, and photothermal coupling through surface plasmon or, photonic resonance. The gratings produced exhibit long term stability of the grating structure and improved shelf life without degradation of the properties such as fluorescence enhancement. Embodiments of the invention build nanograting structures layer-by-layer to optimize structural and optical properties and to enhance durability.
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International Classification(s)
- C08J:WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTE....
- H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
- B82Y:SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; ....
- G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- B82B:NANO-STRUCTURES; MANUFACTURE OR TREATMENT THEREOF
- C01G:COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLAS....
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