RF generator

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10491202
APP PUB NO 20190267978A1
SERIAL NO

16331383

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Abstract

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An RF generator includes: a modulation circuit outputting a pulsed RF signal; a variable attenuation circuit adjusting the level of the pulsed RF signal; an output power detecting unit detecting an output power value of the power output from the device; a first comparative arithmetic circuit outputting a first level control signal for controlling the level of the adjusted pulsed RF signal on the basis of a first detected voltage value and a set voltage value set in advance; a second comparative arithmetic circuit outputting a second level control signal for controlling the level of the adjusted pulsed RF signal on the basis of a second detected voltage value and the set voltage value; and a switching circuit switching between the value of the first level control signal and the value of the second level control signal depending on a switching timing setting value.

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Patent Owner(s)

Patent OwnerAddress
HITACHI KOKUSAI ELECTRIC INCTOKYO 105-8039

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujimoto, Naoya Toyko, JP 12 89
Nasu, Kenji Tokyo, JP 9 40
Oshida, Yoshiyuki Tokyo, JP 10 25

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