Electrochemical polishing of non-uniform features
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United States of America
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May 18, 2017
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May 18, 2017
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Abstract
A method of controlling a working gap between one or more cathodic tools and an anodic workpiece in an electrochemical material dissolution process, the method comprising: providing a cathodic tool and an anodic workpiece defining a working gap therebetween, the cathodic tool and the workpiece being at least partially immersed in a conductive electrolyte solution; providing a negative electrical potential to the cathodic tool; monitoring one or more of the electrical potential, current, current density and charge between the cathodic tool and the anode to determine the working gap between the cathodic tool and the anode; and, controlling one or more process parameters to maintain one or more of the working gap and electrochemical working conditions between the cathodic tool and anodic workpiece at a targeted value.
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