Magnetoelastically actuated MEMS device and methods for its manufacture

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10510945
SERIAL NO

15719219

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A magnetoelastically actuated device includes a microscale cantilever arm supported at a standoff distance from a substrate. The cantilever arm is formed as a laminar magnetic actuator configured to bend when it is subjected to a magnetic field. The cantilever arm includes a film of magnetostrictive material. Also provided is a method for fabricating the magnetoelastically actuated device. The method includes defining an actuator mold in a layer of photoresist on a structural layer of the cantilever arm and electrodepositing a layer of a magnetostrictive alloy containing cobalt and iron onto the structural layer within the actuator mold.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
NATIONAL TECHNOLOGY & ENGINEERING SOLUTIONS OF SANDIA LLCP O BOX 5800 MS-0161 ALBUQUERQUE NM 87185

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arrington, Christian L Albuquerque, US 2 19
Finnegan, Patrick S Albuquerque, US 1 0
Hollowell, Andrew E Albuquerque, US 2 9
Langlois, Eric Albuquerque, US 12 80
Monson, Todd Albuquerque, US 5 3
Pillars, Jamin Ryan Albuquerque, US 4 2

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Jun 17, 2023
7.5 Year Payment $3600.00 $1800.00 $900.00 Jun 17, 2027
11.5 Year Payment $7400.00 $3700.00 $1850.00 Jun 17, 2031
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00