Two-dimensional three-degree-of-freedom micro-motion platform structure for high-precision positioning and measurement
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United States of America
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Dec 13, 2017
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Dec 13, 2017
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Abstract
A two-dimensional three-degree-of-freedom micro-motion platform structure for high-precision positioning and measurement. Two series flexible hinges are connected in parallel to form a moving pair. One end of the moving pair is fixed, and driving force is applied to the other end. The driving force is amplified by means of a lever to drive the moving pair to translate and rotate. The moving pair drives a first flexible hinge of a platform to rotate, thereby driving the platform to produce corresponding displacement. Four identical moving pairs and four identical first flexible hinges respectively constitute four branch hinges which are different in arrangement; two branch hinges opposite to the platform are in central symmetry and constitute one group, and the four branch hinges are divided into two groups in total. The piezoelectric driving mode can be adopted, and thus the linear displacement in the x-axis direction, the linear displacement in the y-axis direction and the angular displacement in the direction around the z-axis are generated for optical precision positioning and measurement.
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