Substrate processing apparatus

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10522370
SERIAL NO

15481686

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Abstract

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A substrate processing apparatus includes a substrate stage that supports a substrate, a follower stage disposed on a same plane as the substrate stage, a first driving unit that moves the follower stage in parallel with a first direction, and a second driving unit that moves the substrate stage in parallel with the first direction. The second driving unit includes a voice magnet member disposed on the substrate stage, and a voice coil member disposed on the follower stage and spaced apart from the voice magnet member.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG ELECTRONICS CO LTDSUWON-SI GYEONGGI-DO 16677

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kim, Jung Jae Hwaseong-si, KR 15 100
Ono, Kazuya Suwon-si, KR 62 916
Park, Sang-Hyun Yongin-si, KR 159 2839

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