Gas distributor for a Siemens reactor

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10525426
APP PUB NO 20160067663A1
SERIAL NO

14782855

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A gas distribution system for a polysilicon deposition reactor eliminates or mitigates the problems associated with prior art distribution systems employs at least two segments which are gas-tightly connected to one another by readily detachable fasteners, with at least one gas inlet opening and one gas outlet opening, the gas distributor of the system being mounted by readily detachable fasteners to the polysilicon reactor.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • WACKER CHEMIE AG

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kutza, Christian Burghausen, DE 5 7
Popp, Friedrich Ooltewah, US 11 28
Roeckl, Martin Rosenheim, DE 1 1
Weiss, Tobias Mehring, DE 19 38

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Jul 7, 2027
11.5 Year Payment $7400.00 $3700.00 $1850.00 Jul 7, 2031
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00