Reversing machine and substrate polishing apparatus

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10525564
APP PUB NO 20170072531A1
SERIAL NO

15248028

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Disclosed is a reversing machine that reverses a substrate upside down. The reversing machine includes: a first arm pair configured to mount a substrate thereon; a second arm pair facing the first arm pair; an opening/closing mechanism configured to open/close the second arm pair so as to grip the substrate mounted on the first arm pair; and a rotating mechanism configured to rotate the first arm pair and the second arm pair around a predetermined axis that is set inside the first arm pair and the second arm pair and extends along an extension direction of the first arm pair and the second arm pair such that the substrate is reversed upside down.

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Patent Owner(s)

Patent OwnerAddress
EBARA CORPORATIONOHTA-KU TOKYO 144-8510

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Akazawa, Kenichi Tokyo, JP 7 2
Hoshina, Manao Tokyo, JP 10 6
Kobayashi, Kenichi Tokyo, JP 267 3418
Yazawa, Akihiro Tokyo, JP 7 13

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