Reversing machine and substrate polishing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America
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Jan 7, 2020
Grant Date -
Mar 16, 2017
app pub date -
Aug 26, 2016
filing date -
Aug 26, 2016
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Disclosed is a reversing machine that reverses a substrate upside down. The reversing machine includes: a first arm pair configured to mount a substrate thereon; a second arm pair facing the first arm pair; an opening/closing mechanism configured to open/close the second arm pair so as to grip the substrate mounted on the first arm pair; and a rotating mechanism configured to rotate the first arm pair and the second arm pair around a predetermined axis that is set inside the first arm pair and the second arm pair and extends along an extension direction of the first arm pair and the second arm pair such that the substrate is reversed upside down.
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