Workpiece transfer apparatus for furnace

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10527353
APP PUB NO 20180245849A1
SERIAL NO

15756425

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A workpiece transfer apparatus for a furnace includes a carrier having access to a furnace and carrying a workpiece placed thereon, a controller for controlling movement of the carrier, the controller for determining an amount of deformation of the carrier by heat of the furnace, and the controller for determining an adjustment to the attitude of the carrier on the basis of the amount of deformation of the carrier, wherein when handing over the workpiece for a next process tool, the carrier is moved into an adjusted attitude.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
TOYODA IRON WORKS CO LTDJAPAN'S AICHI AICHI

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ooyama, Yoshinori Toyota, JP 1 1
Uehara, Kentaroh Toyota, JP 1 1

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