Physical quantity detection element, physical quantity detection device, electronic apparatus, and moving object

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10527644
APP PUB NO 20180180641A1
SERIAL NO

15904732

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A physical quantity detection element includes: a substrate; first and second fixed electrode portions on the substrate; a movable body on the upper portion of the substrate; and a beam on the movable body, the movable body includes a first movable body on a first side of the beam, and a second movable body on a second side of the beam, the first movable body includes a first movable electrode portion facing the first fixed electrode portion and a first mass portion disposed in an opposite direction of the beam from the first movable electrode portion, the second movable body includes a second movable electrode portion facing the second fixed electrode portion, a mass of the first movable body is greater than a mass of the second movable body, and a mass of the first mass portion is greater than a mass of the first movable electrode portion.

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Patent Owner(s)

Patent OwnerAddress
SEIKO EPSON CORPORATIONTOKYO

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kigure, Shota Chino, JP 10 9

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