Semiconductor optical integrated device having buried hetero structure waveguide and deep ridge waveguide

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United States of America

PATENT NO 10534131
APP PUB NO 20190187369A1
SERIAL NO

15929104

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Abstract

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A semiconductor optical integrated device includes: a substrate; at least a lower cladding layer, a waveguide core layer, and an upper cladding layer sequentially layered on the substrate, a buried hetero structure waveguide portion having a waveguide structure in which a semiconductor cladding material is embedded near each of both sides of the waveguide core layer; and a ridge waveguide portion having a waveguide structure in which a semiconductor layer including at least the upper cladding layer protrudes in a mesa shape. Further, a thickness of the upper cladding layer in the buried hetero structure waveguide portion is greater than a thickness of the upper cladding layer in the ridge waveguide portion.

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Patent Owner(s)

Patent OwnerAddress
FURUKAWA ELECTRIC CO LTD2-3 MARUNOUCHI 2-CHOME CHIYODA-KU TOKYO 100-8322

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kimoto, Tatsuya Tokyo, JP 49 105
Kiyota, Kazuaki Tokyo, JP 17 24
Saito, Yusuke Tokyo, JP 72 176

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