Apparatus for treating substrate and method for cleaning guide plate

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10534265
APP PUB NO 20170151588A1
SERIAL NO

15363276

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Importance

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Abstract

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The present disclosure relates to an apparatus for treating a substrate. The apparatus for treating a substrate includes a cup having an inner space whose top is open, a supporting unit for supporting a substrate in the inner space, a guide plate provided to surround the supporting unit, a treatment solution supplying unit for supplying a treatment solution to an upper surface of the substrate supported by the supporting unit, and a cleaning solution supplying unit for supplying a cleaning solution to an upper surface of the guide plate.

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Patent Owner(s)

  • SEMES CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kim, Daesung Gyeonggi-do, KR 94 839

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