Tunable temperature controlled substrate support assembly

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10535544
APP PUB NO 20160329231A1
SERIAL NO

15212946

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Abstract

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Implementations described herein provide a substrate support assembly which enables both lateral and azimuthal tuning of the heat transfer between an electrostatic chuck and a heating assembly. The substrate support assembly comprises a body having a substrate support surface and a lower surface, one or more main resistive heaters disposed in the body, a plurality of spatially tunable heaters disposed in the body, and a spatially tunable heater controller coupled to the plurality of spatially tunable heaters, the spatially tunable heater controller configured to independently control an output one of the plurality of spatially tunable heaters relative to another of the plurality of spatially tunable heaters.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Babayan, Steven E Los Altos, US 32 828
Guo, Zhiqiang Sunnyvale, US 80 536
Makhratchev, Konstantin Fremont, US 29 1307
Marohl, Dan A San Jose, US 28 488
Parkhe, Vijay D San Jose, US 138 3664
Sommer, Phillip R Newark, US 50 4891

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