Distributed electro-static chuck cooling

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10537013
APP PUB NO 20130276981A1
SERIAL NO

13863226

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Abstract

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Embodiments of the invention include an apparatus, system, and method for cooling a pedestal for supporting a workpiece during plasma processing. An embodiment of a pedestal includes: a base over which the workpiece is to be disposed, a plurality of nozzles to supply a fluid from a supply plenum to impinge on a surface of the base, and a plurality of return conduits to return the supplied fluid to a return plenum. The fluid to be supplied by the plurality of nozzles can be projected as one or more jets submerged in surrounding fluid or as a spray that emerges from a surrounding fluid within a volume between the plurality of nozzles and the base to impinge on the surface of the base.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fovell, Richard San Jose, US 41 544
Silveira, Fernando Livermore, US 11 71
Tavassoli, Hamid Cupertino, US 34 397

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