Mold, method for producing mold, anti-reflection film and method for producing anti-reflection film
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United States of America
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Feb 4, 2020
Grant Date -
Feb 2, 2017
app pub date -
Apr 9, 2015
filing date -
Apr 9, 2015
priority date (Note) -
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Abstract
A manufacturing method of a mold includes the steps of: providing an aluminum base in the shape of a hollow cylinder which is made of a Al—Mg—Si based aluminum alloy, the aluminum base being mechanically mirror-finished; performing a frosting treatment on a surface of the aluminum base with an aqueous solution which contains a salt of hydrogen fluoride and ammonium; thereafter, forming an inorganic material layer on the surface of the aluminum base and forming an aluminum film on the inorganic material layer, thereby forming a mold base; and alternately repeating anodization and etching on a surface of the aluminum film of the mold base, thereby forming an inverted moth-eye structure which has a plurality of micro recessed portions.
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