Laser resealing with stress-reducing prestructuring

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United States of America

PATENT NO 10556789
APP PUB NO 20170113923A1
SERIAL NO

15297794

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Abstract

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A method for manufacturing a micromechanical component including a substrate and a cap connected to the substrate and together with the substrate enclosing a first cavity, a first pressure prevailing and a first gas mixture with a first chemical composition being enclosed in the first cavity: in a first method step, an access opening, connecting the first cavity to surroundings of the micromechanical component, being formed in the substrate or in the cap; in a second method step, the first pressure and/or the first chemical composition being adjusted in the first cavity; in a third method step, the access opening being sealed by introducing energy and heat into an absorbing part of the substrate or the cap with the aid of a laser; in a fourth method step, a recess being formed, and/or an elevation being formed, and/or a reflection area being formed, and/or an absorption area being formed.

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Patent Owner(s)

  • ROBERT BOSCH GMBH

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ametowobla, Mawuli Stuttgart, DE 12 13
Kappe, Philip Stuttgart, DE 8 6
Reichenbach, Frank Wannweil, DE 30 269
Reinmuth, Jochen Reutlingen, DE 139 643

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