Exhaust gas treatment apparatus
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United States of America
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Feb 11, 2020
Grant Date -
Feb 7, 2019
app pub date -
Jul 31, 2018
filing date -
Jul 31, 2018
priority date (Note) -
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Abstract
An exhaust gas treatment apparatus for treating an exhaust gas discharged from an EUV (Extreme Ultra Violet) exposure equipment by combustion treatment to make the exhaust gas harmless is disclosed. The exhaust gas treatment apparatus includes a cylindrical combustion chamber configured to combust a processing gas containing hydrogen, and a processing gas nozzle and an oxidizing gas nozzle provided on the combustion chamber and configured to blow the processing gas and an oxidizing gas, respectively, in a tangential direction to an inner circumferential surface of the combustion chamber, wherein the processing gas nozzle and the oxidizing gas nozzle are positioned in the same plane perpendicular to an axis of the combustion chamber.
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