Quantitative measurements using multiple frequency atomic force microscopy

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United States of America

PATENT NO 10557865
APP PUB NO 20170299628A1
SERIAL NO

15640984

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Abstract

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The imaging mode presented here combines the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the second resonant drive frequency operates in FM mode and is adjusted to keep the phase at 90 degrees, on resonance. With this approach, frequency feedback on the second resonant mode and topographic feedback on the first are decoupled, allowing much more stable, robust operation.

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Patent Owner(s)

  • OXFORD INSTRUMENTS ASYLUM RESEARCH, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bemis, Jason Goleta, US 10 27
Proksch, Roger B Goleta, US 11 67

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