Scanning probe microscope using gradual increases and decreases in relative speed when shifting and reciprocating the scanned probe across a sample
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United States of America
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Feb 18, 2020
Grant Date -
Mar 29, 2018
app pub date -
Apr 14, 2015
filing date -
Apr 14, 2015
priority date (Note) -
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Abstract
A scanning probe microscope capable of increasing a relative speed of a probe and making noise unlikely to occur in a measurement result for the surface shape of a sample. When a relative movement direction of the probe is switched at the time of reciprocation in an X direction and a direction opposite to the X direction, the relative speed is gradually decreased and then the direction is switched, and after the switching, the relative speed is gradually increased, to prevent a rapid change in the relative speed. At the time of shifting the probe in a Y direction and a direction opposite to the Y direction, the relative speed of the probe is gradually increased and then the relative speed is gradually decreased, to prevent a rapid change in the relative speed.
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