Drying apparatus

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10566217
APP PUB NO 20190304810A1
SERIAL NO

16015162

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Importance

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Abstract

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A drying apparatus includes an oven body, a magnetic field generating device, a chamber pressure controlling device and a baking device. The oven body is provided with a chamber which is air-hermetic for receiving a semiconductor package element. The chamber pressure controlling device reduces a chamber pressure of the chamber. The magnetic field generating device polarizes liquid on the semiconductor package element in the chamber. The baking device evaporates the liquid on the semiconductor package in the chamber.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING CO LTDNO 8 LI-HSIN RD 6 SCIENCE-BASED INDUSTRIAL PARK HSINCHU 300
GLOBAL UNICHIP CORPORATIONNO 10 LIXING 6TH RD SCIENCE-BASED INDUSTRIAL PARK HSINCHU 30078

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cheng, Chih-Feng Hsinchu, TW 16 7
Liao, Chih-Chieh Hsinchu, TW 12 2
Sun, Yu-Min Hsinchu, TW 16 12

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