Polishing agent, polishing method, and liquid additive for polishing

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10570314
APP PUB NO 20180072917A1
SERIAL NO

15700480

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Abstract

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The present invention relates to a polishing agent including: metal oxide particles; an organic acid having a monodentate ligand; a nonionic polymer; and water, in which the polishing agent has a pH of from 3.0 to 7.0, and the nonionic polymer includes at least one selected from the group consisting of polyglycerin, polyoxyethylene polyglyceryl ether and polyoxypropylene polyglyceryl ether.

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Patent Owner(s)

Patent OwnerAddress
AGC INCTOKYO 100-8405

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kobayashi, Genki Tokyo, JP 5 33

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