Nanoantenna arrays for nanospectroscopy, methods of use and methods of high-throughput nanofabrication

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United States of America

PATENT NO 10571606
APP PUB NO 20130148194A1
SERIAL NO

13509545

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Abstract

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The present invention generally relates to nanoantenna arrays and fabrication methods of said nanoantenna arrays. In particular, one aspect relates to nanoantenna arrays including nanostructures of predefined shapes in predefined patterns, which results in collective excitement of surface plasmons. The nanoantenna arrays can be used for spectroscopy and nanospectroscopy. Another aspects of the present invention relate to a method of high-throughput fabrication of nanoantenna arrays includes fabricating a reusable nanostencil for nanostensil lithography (NSL) which provides a mask to deposit materials onto virtually any support, such as flexible and thin-film stretchable supports. The nanostencil lithography methods enable high quality, high-throughput fabrication of nanostructures on conducting, non-conducting and magnetic supports. The nanostencil can be prepared by etching nanoapertures of predefined patterns into a waffer or ceramic membrane. In some embodiments, a nanoantenna array includes plasmonic nanostructures or non-plasmonic nanostructures.

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Patent Owner(s)

  • THE TRUSTEES OF BOSTON UNIVERSITY

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Adato, Ronen Boston, US 3 170
Aksu, Serap Allston, US 1 167
Altug, Hatice Watertown, US 4 210
Artar, Alp Brighton, US 9 209
Erramilli, Shyamsunder Quincy, US 24 286
Huang, Min Boston, US 325 1882
Yanik, Ahmet Ali Brighton, US 8 194

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