Electromechanical transducer and method of producing the same

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10583462
APP PUB NO 20170333945A1
SERIAL NO

15660813

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Abstract

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A method of producing an electromechanical transducer includes forming an insulating film on a first electrode, forming a sacrificial layer on the insulating film, forming a first membrane on the sacrificial layer, forming a second electrode on the first membrane, forming an etching-hole in the first membrane and removing the sacrificial layer through the etching-hole, and forming a second membrane on the second electrode, and sealing the etching-hole. Forming the second membrane and sealing the etching-hole are performed in one operation.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Akiyama, Takahiro Atsugi, JP 69 283
Tomiyoshi, Toshio Yokohama, JP 16 72
Torashima, Kazutoshi Yokohama, JP 57 316

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