Heating and cooling device

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10583510
APP PUB NO 20170203377A1
SERIAL NO

15479019

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A heating and cooling device including: an airtight processing chamber openable to load a member-to-be-processed in the airtight processing chamber; a transfer apparatus to adjust a distance between the member-to-be-processed and a cooling unit that cools the member-to-be-processed, by moving the member-to-be-processed and/or the cooling unit; an induction heating apparatus to heat the member-to-be-processed, including a induction heating coil; a cooling apparatus to cool the member-to-be-processed by cooling the cooling unit; a temperature sensor to determine a temperature of the member-to-be-processed; and a controller to control the induction heating apparatus and the cooling apparatus based on the temperature determined by the temperature sensor.

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Patent Owner(s)

  • FUJI ELECTRIC CO. LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Igarashi, Yoshio Azumino, JP 14 82
Kikuchi, Masahiro Matsumoto, JP 62 507
Matsushita, Takeshi Matsumoto, JP 114 2304
Momose, Masahiro Matsumoto, JP 3 18
Nakahara, Hiroaki Hino, JP 6 29
Naruse, Mitsuhiro Inagi, JP 2 20
Takeuchi, Masaki Saitama, JP 167 1189
Wada, Takenori Ageo, JP 4 19
Yokoyama, Shoji Hachioji, JP 80 3087

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