System and method for a MEMS transducer

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United States of America

PATENT NO 10589987
SERIAL NO

14073672

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Abstract

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An embodiment as described herein includes a microelectromechanical system (MEMS) with a first MEMS transducer element, a second MEMS transducer element, and a semiconductor substrate. The first and second MEMS transducer elements are disposed at a top surface of the semiconductor substrate and the semiconductor substrate includes a shared cavity acoustically coupled to the first and second MEMS transducer elements.

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Patent Owner(s)

  • INFINEON TECHNOLOGIES AG

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fueldner, Marc Neubiberg, DE 40 716
Hsu, Shu-Ting Unterhaching, DE 18 156
Mandl, Christian Salzburg, AT 22 746
Wiesbauer, Andreas Poertschach, AT 163 1070

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