MEMS microphone

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10589990
SERIAL NO

16134355

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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In accordance with an embodiment, a MEMS microphone includes a sound detection unit having a first membrane, a second membrane arranged at a distance from the first membrane, a low-pressure region arranged between the first membrane and the second membrane, a gas pressure that is reduced in relation to normal pressure being present in said low-pressure region, a counter electrode arranged in the low-pressure region, and a sound through-hole, which extends through the sound detection unit in a thickness direction of the sound detection unit; and a valve provided at the sound through-hole, said valve being configured to adopt a plurality of valve states, wherein a predetermined degree of transmission of the sound through-hole to sound is assigned to each valve state.

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Patent Owner(s)

  • INFINEON TECHNOLOGIES AG

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dehe, Alfons Villingen Schwenning, DE 163 2285
Krumbein, Ulrich Rosenheim, DE 41 289
Metzger-Brueckl, Gerhard Geisenfeld, DE 16 114
Strasser, Johann Schierling, DE 18 150
Wagner, Juergen Nittendorf, DE 34 253
Walther, Arnaud Unterhaching, DE 30 325

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