Micro-electro-mechanical system (MEMS) structures and design structures

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United States of America

PATENT NO 10589992
SERIAL NO

15923013

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Abstract

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Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are disclosed. The method includes forming a Micro-Electro-Mechanical System (MEMS) beam structure by venting both tungsten material and silicon material above and below the MEMS beam to form an upper cavity above the MEMS beam and a lower cavity structure below the MEMS beam.

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Patent Owner(s)

Patent OwnerAddress
INTERNATIONAL BUSINESS MACHINES CORPORATIONNEW ORCHARD ROAD ARMONK NY 10504

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brigham, Michael T Bolton, US 11 31
Jahnes, Christopher V Upper Saddle River, US 87 1865
Luce, Cameron E Colchester, US 15 59
Maling, Jeffrey C Grand Isle, US 43 520
Murphy, William J North Ferrisburgh, US 170 2431
Stamper, Anthony K Burlington, US 613 6580
White, Eric J Charlotte, US 53 616

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