Accelerometric sensor in MEMS technology having high accuracy and low sensitivity to temperature and ageing

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United States of America

PATENT NO 10591505
SERIAL NO

15280720

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Abstract

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The accelerometric sensor has a suspended region, mobile with respect to a supporting structure, and a sensing assembly coupled to the suspended region and configured to detect a movement of the suspended region with respect to the supporting structure. The suspended region has a geometry variable between at least two configurations associated with respective centroids, different from each other. The suspended region is formed by a first region rotatably anchored to the supporting structure and by a second region coupled to the first region through elastic connection elements configured to allow a relative movement of the second region with respect to the first region. A driving assembly is coupled to the second region so as to control the relative movement of the latter with respect to the first region.

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Patent Owner(s)

Patent OwnerAddress
STMICROELECTRONICS S R LAGRATE BRIANZA (MB)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Langfelder, Giacomo Milan, IT 10 18
Rizzini, Francesco Cornaredo, IT 4 3
Tocchio, Alessandro Milan, IT 27 26
Valzasina, Carlo Gessate, IT 36 75

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