Method for manufacturing MEMS devices and nano devices with varying degrees of hydrophobicity and hydrophilicity in a composite photoimageable dry film

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10599034
APP PUB NO 20190056660A1
SERIAL NO

15682485

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Abstract

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A three-dimensional (“3D”) structure for handling fluids, a fluid handling device containing the 3D structure, and a method of making the 3D structure. The method includes providing a composite photoresist material that includes: (a) a first layer devoid of a hydrophobicity agent and (b) at least a second layer comprising the hydrophobicity agent. The composite photoresist material is devoid of an adhesion promotion layer between layers of the composite photoresist material.

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Patent Owner(s)

  • FUNAI ELECTRIC CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bernard, David L Lexington, US 16 21
Craft, Christopher A Lexington, US 9 15
Graham, David C Lexington, US 98 2299
Weaver, Sean T Lexington, US 41 116

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