MEMS device

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10602290
APP PUB NO 20190098424A1
SERIAL NO

16200072

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Importance

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Abstract

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A MEMS device includes a backplate electrode and a membrane disposed spaced apart from the backplate electrode. The membrane includes a displaceable portion and a fixed portion. The backplate electrode and the membrane are arranged such that an overlapping area of the fixed portion of the membrane with the backplate electrode is less than maximum overlapping.

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Patent Owner(s)

  • INFINEON TECHNOLOGIES AG

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Barzen, Stefan Munich, DE 50 483
Dehe, Alfons Villingen Schwenningen, DE 163 2282

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