Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10605530
APP PUB NO 20190032998A1
SERIAL NO

15660805

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

An assembly of a liner and a flange for a vertical furnace for processing substrates is provided. The liner being configured to extend in the interior of a process tube of the vertical furnace, and the flange is configured to at least partially close a liner opening. The liner comprising a substantially cylindrical wall delimited by the liner opening at a lower end and closed at a higher end and being substantially closed for gases above the liner opening and defining an inner space. The flange comprising:

    an inlet opening configured to insert and remove a boat configured to carry substrates in the inner space of the liner;a gas inlet to provide a gas to the inner space. The assembly is constructed and arranged with a gas exhaust opening to remove gas from the inner space and a space between the liner and the low pressure tube.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
ASM IP HOLDING B VVERSTERKERSTRAAT 8 ALMERE 1322AP

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Boonstra, Klaas P Almere, NL 9 1971
de, Ridder Chris G M Almere, NL 19 867
Jdira, Lucian C Nieuw Vennep, NL 12 1688
Keijser, Juul Almere, NL 2 646
Oosterlaken, Theodorus G M Oudewater, NL 27 450
Terhorst, Herbert Almere, NL 46 6711

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Sep 30, 2027
11.5 Year Payment $7400.00 $3700.00 $1850.00 Sep 30, 2031
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00