Method for manufacturing a piezoelectric device

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United States of America

PATENT NO 10608166
APP PUB NO 20170309811A1
SERIAL NO

15641470

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Abstract

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A method for manufacturing a piezoelectric device that includes a substrate, a piezoelectric layer directly or indirectly supported by the substrate and arranged above the substrate, a heater, and a heater electrode for driving the heater. Moreover, the method includes forming the piezoelectric layer, the heater, and the heater electrode and subjecting the piezoelectric device to heat treatment with heat generated from the heater by driving the heater by feeding electric power to the heater electrode.

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Patent Owner(s)

  • MURATA MANUFACTURING CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hada, Takuo Nagaokakyo, JP 17 136
Yamamoto, Kansho Nagaokakyo, JP 16 221

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