Three axis linear actuator

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10608519
APP PUB NO 20170207691A1
SERIAL NO

15406087

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Abstract

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A linear motor for use in semiconductor processing apparatuses. The linear motor is a three axis linear motor that includes magnets that cover end turns of coil windings in order to utilize the end turns to generate a force along a second or third axis. The coil windings are positioned between two magnet arrays and each magnet array has a magnet, such as a voice coil motor (VCM) magnet, positioned along one side to cover the endturns and provide a magnetic flux. A VCM back iron is positioned to provide a magnetic flux return path for the VCM magnets. The structure in conjunction with a DC offset produces a useful force.

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Patent Owner(s)

Patent OwnerAddress
NIKON RESEARCH CORPORATION OF AMERICA1399 SHOREWAY ROAD BELMONT CA 94002

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hemati, Neyram Saratoga, US 6 72

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